Terra Cognita

Chip-level CMP Modeling and Smart Dummy for HDP and Conformal CVD Films

Licence unknown link only — licence forbids redistribution arxiv

George Yong Liu (1), Ray F. Zhang (1), Kelvin Hsu (1), Lawrence Camilletti (2) ((1) CMP Technology, Inc., (2) Conexant Systems Inc.)

arXiv preprint (cs.CE).

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